Products & Technologies
Products & Services
Contact
Products & Services
Products & Technologies
Services
Resources
Contact
Enabling Energy-Efficient Computing
Applied is continuously developing fab and subfab technologies and services that improve the sustainability of our customers’ operations
Boosting Fab-Wide Performance
Applied Materials ecoUP™ integrated solutions, comprising hardware and software, combine energy-efficient technology with intelligent monitoring, analyzing and control capabilities. Applied's ecoUP solutions enable customers to track, manage and reduce greenhouse gas emissions, energy consumption and chemical usage across the fab for new and existing semiconductor wafer processing tools, helping customers advance their sustainability goals while improving operational efficiency.
Optimizing Existing Equipment
Applied Materials ECO Services, within the ecoUP portfolio, is a sustainability focused solution that combines subfab systems with advanced hardware, software and loT-enabled analytics to help semiconductor manufacturers measure, optimize and continuously reduce energy and utility consumption, carbon emissions and cost of ownership on existing tools. By providing real-time visibility and actionable insights, ECO Services enables customers to achieve measurable operational, financial and environmental improvements.
Building Resource-Efficient Next Generation Systems
Applied Materials innovations streamline process flows and co-optimize critical chipmaking steps to reduce energy and chemical impact while improving manufacturing efficiency.
Growing Portfolio of ecoUP Solutions
iSystem Controller
Developed in collaboration with our customer TSMC, the iSystem Controller automates measurement of power usage from the operation of semiconductor fabrication tools, gauging actual energy use against a baseline. The iSystem controller provides continuous greenhouse gas emissions reporting, among other environmental factors, helping customers reduce energy-related costs by about 20%.
ecoTwin
EcoTwin is a digital twin platform that monitors resource consumption by fab equipment so chipmakers can optimize energy and chemical efficiency of their fabs. EcoTwin software automatically generates detailed reports of energy and carbon footprints and related consumption parameters to help customers identify opportunities to reduce consumption and make progress towards their sustainability goals.
Aeris-G
Aeris-G is a pre-pump plasma abatement solution that uses less energy by treating the actual process gas volume. It can be installed within the pump footprint of each chamber. For new tool installations, it saves subfab space, reduces utility and exhaust connections and minimizes installation costs while improving abatement efficiency of greenhouse gases.
Vistara Semiconductor Wafer Manufacturing Platform
Vistara is our first purpose-built platform, designed to support Integrated Materials Solution recipes using more types and sizes of chambers. It combines and co-optimizes multiple process steps within a single tool, reducing platform energy consumption an estimated 35% and chemical footprint about 30% for etch applications.
Centura Sculpta Pattern-Shaping System
The Centura Sculpta system features industry-first patterning technology that eliminates an entire EUV mask layer from a wafer process flow. The innovative system enables energy savings of more than 15 kWh per wafer, direct GHG emissions reduction of more than 0.34 kg of CO2 equivalent per wafer and water savings of about 15 liters per wafer.
ECO Services
An offering from Applied Global Services, under which large numbers of process tools and subfab resources are connected to eco-efficient hardware, software and Internet of Things sensors. The service helps customers measure, optimize, reduce and monitor power and utilities consumption and carbon emissions.