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Growing Eco-Advantaged Portfolio
Applied is continuously developing more fab and subfab technologies and services that improve the sustainability of our customers’ operations
Vistara™ Semiconductor Wafer Manufacturing Platform
Vistara is our first purpose-built platform, designed to support Integrated Materials Solution recipes using more types and sizes of chambers. It combines and co-optimizes multiple process steps within a single tool, reducing platform energy consumption an estimated 35% and chemical footprint about 30% for etch applications.
Centura™ Sculpta™ Pattern-Shaping System
The Centura Sculpta system features industry-first patterning technology that eliminates an entire EUV mask layer from a wafer process flow. The innovative system enables energy savings of more than 15 kWh per wafer, direct GHG emissions reduction of more than 0.34 kg of CO2 equivalent per wafer and water savings of about 15 liters per wafer.
EcoTwin™ Eco-Efficiency Software
EcoTwin is a digital twin platform that can monitor and model recipes and operations so chipmakers can optimize energy and chemical efficiency in their fabs. The EcoTwin software tool automatically generates detailed reports of carbon footprints and related consumption parameters from both the fab and subfab to help customers identify opportunities to reduce consumption.
iSystem™ Controller
Developed in collaboration with our customer TSMC, the iSystem Controller automates measurement of power usage from the operation of semiconductor fabrication tools, gauging actual energy use against a baseline. The iSystem controller provides continuous greenhouse gas emissions reporting, among other environmental factors, helping customers reduce energy-related costs by about 20%.
Aeris™-G
Aeris-G is a pre-pump plasma abatement solution that uses less energy by treating the actual process gas volume. It can be installed within the pump footprint of each chamber. For new tool installations, it saves subfab space, reduces utility and exhaust connections and minimizes installation costs while improving abatement efficiency of greenhouse gases.
ECO Services
An offering from Applied Global Services, under which large numbers of process tools and subfab resources are connected to eco-efficient hardware, software and Internet of Things sensors. The service helps customers measure, optimize, reduce and monitor power and utilities consumption and carbon emissions.