Applied TopCoil

Evaporation system based on induction heated crucibles

The TopCoil platform complements Applied Materials’ evaporation portfolio with induction heated crucible technology. This is a solution for applications demanding low defect performance and also enables the deposition of a wide range of materials.

  • TopCoil enables a wide range of applications beyond traditional (food) packaging by induction heated crucibles
  • Virtually pinhole-free without significant compromise on web speed combined with improved layer uniformity
  • TopCoil enables the deposition of a wide variety of metals and metal-oxide including: Al, Zn, Ag, Cu, Cr, ZnS and Oxides
  • Innovative inductor design allows closer proximity of sources to each other with reduced interference
  • Stable process at speeds up to 14m/sec