Anneal products are extensively used in semiconductor device manufacturing for changing electrical or physical properties of a material (conductivity, permittivity, densification, or contamination reduction).
The Centura DPN HD (high dose) system consists of decoupled plasma nitridation (DPN) and post-nitridation anneal (PNA) chambers...
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As CDs continue shrinking, the number of steps needed to pattern small structures is increasing, thus creating the need for treatments...
The Applied Vantage Astra DSA (dynamic surface anneal) system is Applied Materials' first laser-based annealing tool, offering unmatched...
Advanced device scaling requires thinner, higher quality oxides with low leakage and high reliability, reduced thermal budgets, and...
The Applied Vantage RadiancePlus RTP system is the industry-leading, high-productivity solution for high-volume, atmospheric RTP...
A major spike annealing challenge at 32/28nm node and below is minimizing temperature differences arising from variations in radiant...
