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Actionable

Insight Accelerator

Accelerating Time-to-Market with Actionable Insights

Semiconductor chip manufacturing requires hundreds to several thousands of process steps conducted in series. To achieve ideal results, each process step requires a specific recipe, created from hundreds of equipment parameters, that can vary across the duration of that recipe. Engineers now have thousands of process variables to choose from, with only a handful of elusive correlations providing the key to recipe optimization. 

AIx™, which stands for Actionable Insight Accelerator, enables engineers to see into semiconductor processes in real-time, take millions of measurements across wafers and individual chips, and optimize thousands of process variables to improve semiconductor performance, power, area, cost and time to market. The AIx platform works across all Applied Materials process equipment, eBeam™ metrology systems and inspection systems, and is extendable from lab to fab. By providing engineers with the ability to fingerprint innovative recipes during R&D, AIx accelerates their transfer and ramp into high-volume manufacturing (HVM). 

The AIx platform includes:

  • ChamberAI®technology: New sensors and machine learning algorithms for Applied Materials process chambers with real-time analytics of variables 

  • On-board metrology: Unique in-vacuum metrology that enables new films to be measured as they are being deposited, with angstrom-level precision

  • Inline metrology: Unique algorithms based on Applied eBeam metrology which can provide a 100-fold increase in measurement speed with 50 percent higher resolution

  • AppliedPRO® software: Process Recipe Optimizer generates digital process maps that accelerate materials and recipe development, reduce variability, and widen process windows

  • Digital twins: The AIx platform includes digital twin models of select Applied Materials chambers and systems that enable virtual experiments as well as on-demand energy and chemical consumption of semiconductor manufacturing equipment through our EcoTwin efficiency software

  • Computing: The AIx platform includes the computing resources needed to store and analyze massive data using machine learning and AI algorithms

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Aix Insights