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Novel Architecture: Patent-Pending and Patented X-ray Technology

EclipseXRM was designed by Dr. Wenbing Yun, a pioneer in a synchrotron and aboratory X-ray microscopy for over four decades. He has received more than four prestigious R&D 100 awards for his X-ray microscope innovations. The system incorporates several patent-pending and patented technologies developed by Sigray, along with the latest hardware advances, such as maintenance-free air-bearing rotary stages with sub-50nm runout and high-efficiency CMOS sensors.

The system has been adopted by leading semiconductor companies and research institutions worldwide. (To request a complimentary demo on a local system or through Sigray, please fill out the form below).

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Software: GigaRecon Tomography & Sigray3D Acquisition

GigaRecon | A tomographic reconstruction software that delivers the fastest reconstruction times along with an unmatched suite of features for achieving optimal results. Reconstruction speeds of <45 seconds are achieved for 2048 x 2048 x 2200 datasets. GigaRecon also provides the fastest iterative tomography reconstruction on the market, enabling high-quality image reconstruction with five times shorter data collection times, substantially accelerating tomography imaging compared to conventional FDK reconstruction.

Sigray3D | Intuitive Acquisition with XRM Companion

• Easy, intuitive software gets your team up and running in no time
• Click to align the sample and start measuring in seconds
• AI-powered AutoPilot suggests the optimal settings for each sample
• Queue samples with the automated Sample Handling Robot (SHR) for weekend and overnight runs without operator assistance

GigaRecon provides powerful reconstruction approaches that can significantly accelerate acquisition time. Left is a human tooth with a metal implant reconstructed through standard FDK (feldkamp), right is Gigarecon reconstruction of the same 5 minute data.

XRM Companion features an intuitive GUI for acquiring and measuring data

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Phase Retrieval

EclipseXRM provides practical phase contrast for biological, polymeric, and geological samples, accessible on the system without the prolonged acquisition times required by other systems. Additionally, phase contrast information can be easily retrieved using Sigray’s phase retrieval software for quantification and analysis.

EclipseXRM provides phase contrast imaging capabilities and straightforward phase retrieval to enable enhanced data analysis

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Semiconductor Failure Analysis

3D x-ray microscopy has become the workhorse approach to investigating failures in semiconductor packaging. Due to the ever-decreasing sizes of packaging features, increasing higher resolution is required to detect failures such as cracks, voids, and delamination. The zoomed-in image of a single wire bond shown on the right demonstrates the superior resolution and contrast of EclipseXRM for semiconductor samples.

Note: Most of our results cannot be shown due to NDAs. If you would like a true understanding of our capabilities, please send us a sample so that we can demonstrate them on your sample. The universal response to our semiconductor FA capabilities has been extreme excitement due to the unprecedented level of detail and contrast we achieve.

Microbumps imaged: leading XRM vs. EclipseXRM

MicroSD card imaged at 0.15um

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Intact Batteries and Batteries in-operando

EclipseXRM provides variable resolution within a sample, enabling hierarchical characterization of batteries—from the full field of view (FOV) to detailed region-of-interest imaging—without the need to de-package the battery. This allows for the non-destructive identification of issues such as small defects (e.g., cracks, particles) and shorts. EclipseXRM also delivers high resolution for detailed analysis of electrode particles, capturing their shape, size, and any defects (e.g., voids, cracks).

Sigray’s powerful capabilities for batteries and the associated papers can be found on its Batteries applications page.

Ultrahigh resolution (0.21 um voxel) imaging of battery cathode particles

Region of interest of battery cathode particles (0.21 um)

Cross-sectional view of an intact coin cell, showing flexibility of EclipseXRM

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Biological and Polymer Samples

Biological and other low-density samples, such as polymers, can be extremely challenging to image using conventional x-ray techniques like microCT due to their low absorption and ultrahigh resolution requirements. EclipseXRM provides both superior contrast and resolution, enabling the visualization of sub-cellular details.

Shown in the example to the right is a mouse sciatic nerve sample, demonstrating how the system’s ultrahigh resolution clearly reveals the axons and myelin sheaths.

Mouse sciatic nerve samples at 0.25 µm

Cropped region of interest of mouse sciatic nerve cells (0.25 µm)

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In-situ Microstructural Evolution

A significant advantage of EclipseXRM’s design is its ability to maintain high submicron resolution for large samples, enabling high fidelity imaging of specimens placed in larger in-situ cells. The system can capture 3D micro-structural evolution in samples under various conditions, including heating, cooling, tension and compression (T&C), fluid/gas flow, and more. We provide robust in-situ solutions tailored to your needs.

Dendritic growth imaged on PrismaXRM (Sigray’s leading XRM prior to EclipseXRM’s release) on a Zn-ion battery.
Ref: Qian, G., Zan, G., Li, J., Lee, S.-J., Wang, Y., Zhu, Y., Gul, S., Vine, D. J., Lewis, S., Yun, W., Ma, Z.-F., Pianetta, P., Lee, J.-S., Li, L., Liu, Y., Structural, Dynamic, and Chemical Complexities in Zinc Anode of an Operating Aqueous Zn-Ion Battery. Adv. Energy Mater. 2022, 12, 2200255.
https://doi.org/10.1002/aenm.202200255

In-situ cells are manufactured by a variety of manufacturers and can provide heating, T&C, fluid flow, and electrical power