SEMVision G9 accelerates defect review across logic, memory and other devices, delivering higher productivity through trusted image quality and integrated AI that scales detection and classification across the fleet – at a competitive cost of ownership.

Why it matters: Increasing device complexity and 3D scaling are driving denser defect maps, creating load on review capacity SEMVision™ G9 expands the review budget by enabling more sites and samples at speed, so engineers can cover all layers - from FEOL to BEOL, without compromising cycle time or cost of ownership. Integrated AI further cuts manual effort and shortens time to result, accelerating high‑confidence production decisions.

What’s new:

• Improved imaging: higher beam current accelerates image acquisition, while increased maximum acceleration voltage paired with Elluminator™ wide back scattered electron (BSE) detector delivers clear visibility across challenging buried and high‑aspect‑ratio structures.
• Enhanced Image quality: Upgraded image‑processing algorithms provide best‑in‑class image quality, preserving defect signal even under noisy conditions
• Throughput & flow upgrades: Improved motion control and reduced overheads shorten end‑to‑end review time.
• Specialized AI flows: Mass-production‑proven ADR AI supports single image detection and CAD‑based detection, while ADC AI (Purity™ III) classification delivers faster, more accurate results.
• Continuity: plug-and-play support for world-leading SEMVision G7 recipes and imaging enables performance gains without disrupting production, with a full upgrade path from the SEMVision G7 family to the SEMVision G9.

Key applications: As the defect‑review leader, SEMVision supports a broad range of applications. The G9 brings unique capabilities, including beam e‑tilt, high depth-of-field-bevel imaging, DUV for bare and blanket wafers, material analysis, and the Elluminator wide BSE detector.

Bottom line: More wafers, more insight, less manual effort – SEMVision G9 pairs trusted imaging with integrated AI to drive faster, higher‑confidence production decisions.