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솔루션 및 소프트웨어
SAQP
Eases Litho Resolution
SAQP effectively decreases the lithography resolution by 4x using a spacer-based patterning approach with one lithography step and two spacer depositions.
It is critical for unidimensional design rules and will be used in semiconductor processes at the 10nm node and beyond.
SAQP video 1280 x 720
- Filename
- saqp00_0000_full.png
- Size
- 2 MB
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- image/png
- Filename
- saqp01_0033_full.png
- Size
- 2 MB
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- image/png
- Filename
- saqp02_0084_full.png
- Size
- 2 MB
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- Filename
- saqp05_0183_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqp08_0252_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqp09_0290_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqp11_0351_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqp13_0406_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqp15_0451_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqp17_0521_full.png
- Size
- 2 MB
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- image/png
- Filename
- saqp19_0580_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqp21_0625_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront05_0183_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront08_0252_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront11_0351_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront13_0406_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront17_0521_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqpfront21_0625_full.png
- Size
- 892 KB
- Format
- image/png
- Filename
- saqptop00_0000_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqptop05_0183_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop11_0351_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop13_0406_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqptop17_0521_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop21_0625_full.png
- Size
- 1 MB
- Format
- image/png
