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SAQP
Eases Litho Resolution
SAQP effectively decreases the lithography resolution by 4x using a spacer-based patterning approach with one lithography step and two spacer depositions.
It is critical for unidimensional design rules and will be used in semiconductor processes at the 10nm node and beyond.
SAQP video 1280 x 720
- Filename
- saqp00_0000_full.png
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- 2 MB
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- saqp01_0033_full.png
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- 2 MB
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- saqp02_0084_full.png
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- 2 MB
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- saqp05_0183_full.png
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- 1 MB
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- saqp08_0252_full.png
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- 1 MB
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- saqp09_0290_full.png
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- 1 MB
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- saqp11_0351_full.png
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- 1 MB
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- saqp13_0406_full.png
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- 1 MB
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- Filename
- saqp15_0451_full.png
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- 1 MB
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- saqp17_0521_full.png
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- 2 MB
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- saqp19_0580_full.png
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- 2 MB
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- saqp21_0625_full.png
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- 1 MB
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- saqpfront05_0183_full.png
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- 1 MB
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- saqpfront08_0252_full.png
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- 1 MB
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- saqpfront11_0351_full.png
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- 1 MB
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- Filename
- saqpfront13_0406_full.png
- Size
- 1 MB
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- Filename
- saqpfront17_0521_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqpfront21_0625_full.png
- Size
- 892 KB
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- image/png
- Filename
- saqptop00_0000_full.png
- Size
- 1 MB
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- image/png
- Filename
- saqptop05_0183_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop11_0351_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop13_0406_full.png
- Size
- 1 MB
- Format
- image/png
- Filename
- saqptop17_0521_full.png
- Size
- 2 MB
- Format
- image/png
- Filename
- saqptop21_0625_full.png
- Size
- 1 MB
- Format
- image/png
