nanochip fab solutions
Nanochip 快訊，2016年10月
Chamber Matching — Easier Said Than Done
By Kevin Sannes
It seems easy enough: to maximize production of a given product, simply optimize the operating parameters of one “golden” tool and then duplicate them exactly across all the tools in the fleet to obtain perfectly matched performance. However, chamber matching is a prime example of the axiom "easier said than done."
Micro-Arcing During High-Density Plasma Chemical Vapor Deposition
By Calvin Chang, Joseph Farah and Lin Zhang
This article discusses micro-arcing and a new service strategy to help device makers manage particle contamination, wafer scrap, yield loss and tool downtime.
28th Annual U.S. APC Conference: Challenges and Practical Solutions in Advanced Process Control
By Nanochip Staff
Get the latest information on fault detection (FD) control, run-to-run (R2R) control, predictive technologies including virtual metrology and predictive maintenance, big data and big data analytics, and the impact of new approaches such as smart manufacturing at the 28th Annual U.S. APC Conference.
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