Low Temperature Polysilicon (LTPS) transistor manufacturing is more complex than amorphous silicon (a-Si) and metal oxide transistor fabrication, requiring additional steps and processes.
With minimal mechanical motion the AKT EBT TFT array tester realizes high-reliability, low scheduled down time and low running cost. The...
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The Applied AKT-PX family of PECVD systems deposits highly-uniform low temperature polysilicon (LTPS) films on glass substrates from 1.6...
