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iSystem™ Controller

While monitoring tool operation, the Applied iSystem controller collects valuable data that can be used to generate resource consumption reports and greenhouse gas emissions reports among other environmental factors. Each small footprint iSystem controller is capable of supporting up to four tools and is easily installed on both Applied and non-Applied Materials 200mm and 300mm process tools. With more than 3000 tool connections currently installed, manufacturers have reported rapid ROI after using the iSystem controller.

功能特性

  • 易於安裝到新的和現有的晶圓廠

  • 在機台或下夾層上可配置

  • 失效安全協議

  • 真正的生產廠房和下夾層同步

  • 智能閒置模式

  • Supports Semi E167 and E175 standards for Sleep Mode

  • Subfab data collection, alarm monitoring, notifications and reporting

  • Subfab status visibility from a single monitor

  • Applied E3 and FSS data server support for complete fab/subfab data analysis

福利

  • 將能源相關成本減低 ~20%

  • 即時連接到製程機台

  • Enables green features with no equipment changes or process re-qualification needed

  • Provides continuous greenhouse gas emissions reporting

  • Enables fab/subfab data integration and overlay

  • 2 秒內即可從閒置狀態恢復到製程狀態燃料流量