While monitoring tool operation, the Applied iSystem controller collects valuable data that can be used to generate resource consumption reports and greenhouse gas emissions reports among other environmental factors. Each small footprint iSystem controller is capable of supporting up to four tools and is easily installed on both Applied and non-Applied Materials 200mm and 300mm process tools. With more than 3000 tool connections currently installed, manufacturers have reported rapid ROI after using the iSystem controller.
Supports Semi E167 and E175 standards for Sleep Mode
Subfab data collection, alarm monitoring, notifications and reporting
Subfab status visibility from a single monitor
Applied E3 and FSS data server support for complete fab/subfab data analysis
Enables green features with no equipment changes or process re-qualification needed
Provides continuous greenhouse gas emissions reporting
Enables fab/subfab data integration and overlay