nanochip fab solutions
December 2014 Issue
James Moyne and Michael Armacost
The move from reactive to predictive analytics in semiconductor manufacturing is being enabled by the corresponding move to big data solutions for advanced process control (APC) systems.
Lokesh Kulkarini, Sidda Kurakula, and Helen Armer
As fabs become increasingly data driven, data mining to extract and analyze useful information is assuming more importance.
The fab is continually becoming more data driven and requirements for data volumes, communication speeds, quality, merging, and usability need to be understood and quantified.
Jeffrey Dietz and Florent Ducrot
Advanced analytical and control capabilities match those used in 300mm equipment.
Jianping Zou, PhD, Adrianto Kumara, and Kwee Thiam Lim
Pilot runs in semiconductor manufacturing are expensive. For a fab running 60,000 wafer starts per month, it could cost over $2.4 million per year for pilot runs, or $340,000 per year for each module.
Ryoto Kojima, Fujitsu Semiconductor, Ltd., and Manjunath Yedatore, Applied Materials, Inc.
Collaborative work between Fujitsu Semiconductor and Applied Materials on RTP tool performance resulted in the development of a tool health indicator that can predict the need for maintenance.
Arun Srivatsa and Scott Bushman
Two factors have dominated recent technology transitions for both logic and memory devices and increased the challenges for process control.
Kerry L Cunningham
The screens on today’s smartphones and tablet PCs may be stunning, but they are just a preview of what’s yet to come in the world of displays.