Vantage® Radiance®Plus RTP
The Applied Vantage RadiancePlus RTP system is the industry-leading, high-productivity solution for high-volume, atmospheric RTP applications, combining world-class RTP chamber technology with a production-proven, low CoO platform. Its streamlined design allows for shipment as a single unit, enabling faster start-up and reduced shorter time to production.
The system leverages established Radiance chamber technology: honeycomb lamp source, seven-point temperature measurement, 100 Hz closed-loop control, and 240 rpm wafer rotation. Its optimized hardware and temperature control delivers unsurpassed spike anneal uniformity for implant and other anneals, and extended low-temperature salicide processing.