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Evaporation system based on induction heated crucibles

The TopCoil™ platform complements Applied Materials’ evaporation portfolio with induction heated crucible technology. This is a solution for applications demanding aggressive, low defect performance and also enables depositing a wide range of materials

  • TopCoil™ enables a wide range of applications beyond traditional (food) packaging by induction heated crucibles
  • Virtually pinhole-free without significant compromise on web speed combined with improved layer uniformity
  • TopCoil™ allows evaporating and depositing a wide variety of metals and metal-oxide such as: Al, Zn, Ag, Cu, Cr, ZnS , Oxides,…
  • Innovative inductor design allows closer proximity of sources to each other with reduced interference
  • Stable process at increased speeds up to 10 – 14m/sec