E3 Fault Detection and Classification (FDC)

The E3 Fault Detection and Classification (FDC) module is built on a common platform and continuously monitors equipment parameters against preconfigured limits using statistical analysis techniques to provide proactive and rapid feedback on equipment health. It eliminates unscheduled downtime, improves tool availability and reduces scrap. E3 FDC is proven to detect equipment issues faster than other similar systems and is the only solution built on a single platform that works with multiple EES and APC systems.

• Allows engineers to analyze sensor data from manufacturing equipment, detect out-of-norm conditions and trace them back to the tool issues
• Provides flexibility to perform corrective maintenance, predict equipment problems and proactively schedule repairs prior to failure
• Enables reuse of classification models within process areas
• Includes library of uni- and multivariate analysis tools for developing detailed diagnostic models
• Integrates seamlessly with E3 statistical process control (SPC), E3 equipment performance tracking (EPT), E3 advanced data mining (ADM) and E3 run-to-run control (R2R) systems to promote information sharing across components
  • Lower cost of ownership
  • Improve equipment performance
  • Reduce scrap
  • Diminish equipment and process false alarms
  • Minimize unscheduled and scheduled equipment downtime

Benefits