High Energy Technology

Varian Semiconductor offers the only single-wafer high energy implanters available on the market today. Our high energy VIISta series features true-zero degree implant and low contamination. VIISta high energy systems offer an advantage for semiconductor manufacturers that need increased device packing density in high-performance devices.

The VIISta High Energy Implanters Feature

• Outstanding process accuracy
• Highest productivity
• Excellent uniformity
• Outstanding angle control
• Medium-current back-up flexibility

Varian Semiconductor’s High Energy Products Cover

• Retrograde well
• Triple well
• Buried layers
• Most medium current applications

Common Platform

• Decreased time to first silicon
• Greater productivity across all applications
• Highest industry throughput
• Precise beam steering and tilt accuracy
• Flexible product mix changes
• Cost-effective training
• Increased return on investment