E3 Equipment Performance Tracking (EPT)

The E3 Equipment Performance Tracking (EPT) module removes bottlenecks and optimizes performance by monitoring every processing tool to provide granular data and actionable OEE metrics. As part of an equipment engineering system (EES), E3 EPT can produce tool metrics such as losses from reduced speed, idle time and other white-space areas. With superior data and reporting offered by this closed-loop system, manufacturers can identify and act upon opportunities to maximize equipment efficiency.  

• Provides data about suboptimal process throughput
• Compares equipment performance at sub-second level to identify areas where efficiency improvements can be made
• Requires no coding for state modeling and configuration
• Uncovers hidden data about tool movements without relying on MES high-level tool data
• Uses fault-detection data sent by E3 Fault Detection and Classification (FDC) module to set the state of the equipment, providing a closed-loop system
• Includes visual and statistical reporting tools
• Integrates seamlessly with E3 Statistical Process Control (SPC), E3 Fault Detection and Classification (FDC), E3 Run-to-Run Control (R2R) and E3 Advanced Data Mining (ADM)

Benefits

• Improve factory performance
• Increase OEE
• Eliminate bottlenecks
• Reduce equipment white space

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