设备生产效率

E3 Chamber Variance Reporting App

关键特征

  • High-resolution data and recipe-step sensor statistics visualization
  • Automated, multivariable chamber-performance reports
  • Automatic email notification of new sources of chamber differences
  • Web-based interface

The E3 Chamber Variance Reporting (CVR) App solves chamber matching issues, helping fabs increase yields and tool efficiency by allowing engineers to easily and quickly perform root-cause analysis on thousands of sensors and process variables. The E3 CVR App generates automatic reports comparing chamber performance across these variables using high-resolution data up to 5 Hz.

  • Provides automated execution of reports daily or by shift
  • Offers access to historical reports and data 90 days back
  • Notifies fab operators of new sources of chamber differences via automatically generated email messages that list significantly different process variables across chambers

Benefits

  • Enhance analysis through automation and notification of chamber variances
  • Deploy quickly
  • Improve yields
  • Increase tool efficiency

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