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E3 AKT PECVD Vacuum Integrity App

关键特征

  • Tool integration adapter connects to IEDS software
  • UVA models monitor key parameters
  • Intuitive, configurable dashboard for real-time data plotting
  • Automatic or immediate intervention triggers

The E3 AKT PECVD Vacuum Integrity App is a preconfigured software package that uncovers hard-to-find leaks before they affect process output, minimizing downtime from maintenance, lowering scrap to improve total throughput and reducing total cost of ownership. It is proven to increase tool utilization by 1.5 percent.

  • Connects instantly to IEDS software on AKT PECVD tool to collect data
  • Monitors parameters during deposition process using predefined univariate analysis (UVA) models for rapid air-leak detection
  • Triggers action based on pre-set fault conditions

Benefits

  • Implement quickly
  • Identify air leaks proactively
  • Minimize maintenance downtime
  • Increase throughput
  • Reduce number of faults with intelligent sensor monitoring
  • Reduce scrap

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