E3 Apps

E3 Apps are turnkey software solutions that enable manufacturers to optimize equipment performance by monitoring, detecting and correcting key issues with process equipment. Intelligently built, E3 Apps track the right sensors, extract the correct data and take the appropriate actions to help manufacturers improve efficiency and drive revenue. E3 Apps are proven to reduce maintenance time and scrap and increase tool availability and utilization for both Applied and non-Applied tools.

• Speeds implementation through preconfigured tool integration, prequalified sensor-data collection plans and detection and correlation models
• Triggers actions based on preset conditions
• Works out-of-the-box with server hardware and third-party database software
• Includes quick deployment assistance, user training and one year of full support from Applied
• Provides single contact point for hardware/software components

E3 Apps

• E3 Chamber Variance Reporting App
• E3 AKT PECVD Vacuum Integrity App
• E3 Baccini Print Process Monitor App
• E3 Centura Ultima X HDP-CVD Chamber Pressure Monitor App
• E3 Endura PVD Wafer Arc Detection App
• E3 Litho Overlay Correction App

Benefits

• Improve equipment performance rapidly
• Boost tool utilization
• Reduce scrap

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