Semiconductor Services

Parts Management Programs Minimize inventory burden and risk with Applied Materials' Total Parts Management™ program. The program delivers parts promptly at guaranteed service levels on most commonly used parts.

Parts when they are needed. PartsOnDemand (POD) is a cost-effective, flexible spares program matching part orders to needs and offers emergency level support options, with a 14 day lead-time commitment for a fixed parts list and no quantity or forecast commitments required. For more information about localized parts repair and refurbishment, ask Applied Global Services.

Performance-Based Maintenance If you need comprehensive 24x7 support, our Applied Performance Service delivers. Tool performance-based pricing and predictable costs enable low cost of ownership and includes preventive and corrective maintenance, genuine parts, spares management, kitting and cleaning and remote connectivity.

Remote Diagnostics and Predictive Maintenance Rapidly identify and repair problems with the help of our ExpertConnect™ capability. Applied Materials; global support infrastructure, best practices database, remote diagnostics and robust data acquisition systems enable more efficient troubleshooting, tool matching, tool monitoring and faster response.

Cleaning and Coating Experience world-class precision cleaning, technology-enhanced coating and refurbishment services on chamber process kits and components. With an extensive understanding of equipment and process chamber types, including etch, CVD, ALD, PVD, and EPI/RTP.

Equipment/Technology Conversions Configurable solutions include wafer size conversions, system reconfigurations, process chamber conversions and extension of technology.

Refurbishment Cost-effective and low risk, our remanufactured products adhere to the same ISO-certified manufacturing standards as new Applied Materials equipment and come with the same high service levels.  State-of-the-art testing methods ensure that every tool conforms to original specifications, meets proper safety standards, and includes licensed system software.

Upgrades Applied Materials offers a large portfolio of upgrades to boost throughput, increase yields and meet targets for energy efficiency and PFC reduction.  Choose Applied Materials upgrade equipment tools when market demands change.  Visit the Applied Materials Customer Portal for details. 

Abatement Applied Materials leads the way with the industry’s first fully integrated subfab solution for controlling emissions in the semiconductor fab.  The Applied iSYS™ platform is highly compact and energy-efficient, integrating abatement and vacuum pump technologies.  Available for 300mm and 200mm CVD and etch applications.

Automation Software Applied Materials has an integrated suite of manufacturing automation software systems that delivers real business results for semiconductor, display and solar manufacturers. More information on Applied Materials Automation Software is available. 

Consulting The Applied Materials FabVantage™ consulting team works closely with customers to uncover solutions to tool and fab-level challenges.  Through benchmarking, analysis and customized solutions, we help lower cost, reduce waste and increase output for substantial performance improvements and quick ROI.

- Factory Transition Services
- Automation Software
- Consulting
- Spares and Consumables for Varian Equipment
- Managed Inventory
- Customer Paid Repair
- Product Upgrades
- Customer Support Services
- Technical Support Library

Mask Equipment Services

One defect in a mask etch chamber can mean zero yield, making services like cleaning essential for scheduled and corrective maintenance procedures. And since most tools in a mask shop are in the critical path, high system uptime is essential. Applied Materials offers a wide array of services and parts options to improve and guarantee uptime according to the customer's specific performance and cost objectives. These range from simple time-and-materials repair and parts contracts to sophisticated programs like maxPerformance which provides rapid response for high volume support and on-site spares kitting.

ALTA Mask Pattern Generators

With the industry’s largest installed base of mask pattern generators, reliable ALTA systems are used to write 1 in every 3 masks manufactured annually worldwide. In fact, every system installed since 1994 is still in production.*

*as of September 16, 2011

ALTA 4700plus Mask Writer

The Applied ALTA 4700plus is Applied Materials' flagship DUV laser mask writer. It generates sub‑100nm node masks with very high accuracy and high throughput. Its flexible writing modes can produce high accuracy masks with very short turnaround times and high precision 2nd layer PSM Masks.

ALTA 3900 Mask Writer

The production-proven, high reliability ALTA 3900 generates masks for all layers down to 130nm, sub-critical layers smaller than 130nm and 2nd layer PSM masks, with very high accuracy and throughput. It is also suitable for replacement of 10kV EB writers.