Medium Current Technology

Recognized as the industry benchmark for medium current performance and productivity, Varian Semiconductor’s single-wafer medium current VIISta series ion implanters provide superior overall throughput, precision, doping capability, and unmatched contamination control.

The VIISta Medium Current Family Features

• The industry’s highest throughput
• A patented dose control, ensuring precise implantations
• A unique dual-magnet beamline design, delivering up to 10X better contamination performance than batch systems
• The ability to support subMeV well applications

Common Platform

• Decreased time to first silicon
• Greater productivity across all applications
• Highest industry throughput
• Precise beam steering and tilt accuracy
• Flexible product mix changes
• Cost-effective training
• Increased return on investment