High Current Technology

Varian Semiconductor is the leader in high current ion implanters, shipping more single-wafer high current systems than all other competitors combined.

The VIISta High Current Series Features

• Dual-magnet, ribbon beam architecture with a demonstrated 2X improvement in particle performance vs. other companies’ high current tools
• The patented Closed-Loop Varian Positioning System (VPS) delivers accurate and repeatable incident beam angle control

Our High Current Implanters Benefits

• Highest productivity on a production-proven single-wafer architecture and highest overall productivity of any ion implanter in the industry
• Best particle performance
• Production-proven results from leading-edge memory, logic, and foundry manufacturers worldwide

Common Platform

• Decreased time to first silicon
• Greater productivity across all applications
• Highest industry throughput
• Precise beam steering and tilt accuracy
• Flexible product mix changes
• Cost-effective training
• Increased return on investment