|Varian Semiconductor’s full suite of high current, medium current and high energy ion implanters are based on a common platform.|
Our Unique Platform Leverages Common Technologies Optimized for
This Proven Platform Offers
This Platform Provides Customers with Flexibility in Managing Overall Bay Productivity, Resulting in
The VIISta platform enables the transition from batch to single-wafer systems by providing all of the advantages of precise angle control and superior particle performance, while maximizing productivity.