VIISta HCS

Industry Benchmark High Current System of Choice for Advanced Device Manufacturers
VIISta HCS delivers superior device performance and yield on the industry-benchmark, dual-magnet ribbon beam architecture. It is the only single wafer high current system with a system architecture that extends capability in both high yield and high productivity.

Cleanest System with Dual-Magnet Ribbon Beam Architecture
Ion source and beamline elements generate particles due to depositions and beam strike. The patented dual-magnet ribbon beam architecture’s second magnet filters out beam-borne particles and directs cleanest ion beam onto the wafer. Recognized as the cleanest tool in a fab, the VIISta HCS assures the highest yield and enables particle sensitive advanced applications such as photoresist curing and mask-less etch stop.

Precise Horizontal and Vertical Beam Steering Angle Control
The VIISta HCS is the most advanced high-current system that measures and adjusts beam steering in both horizontal and vertical direction. The patented closed-loop Varian Positioning System (VPS) delivers accurate, repeatable and interlocked incident angle control for the true zero degree and precise tilted angle implants. This unique feature delivers superior device performance by minimizing transistor asymmetry that may result from beam setup-to-setup variation.

Highest Productivity
The VIISta HCS brings new flexibility to further increase its productivity. Innovations on the ion source and beamline elements result in higher beam current output and improved low energy beam transmission. The flexibility of operation modes optimizes productivity and beam energy quality for maximum overall throughput. The system architecture design results in highest reliability and availability. These innovative features of VIISta HCS maximizes overall throughput and reduces capital investment for high volume IC manufacturers.

High Current Industry Benchmark
Varian Semiconductor was the first to introduce single wafer high current systems. The VIISta high current series is the industry benchmark and PTOR at most leading-edge memory, logic and foundry manufacturers worldwide. The widespread adoption of VIISta high current systems enables rapid device matching between advanced device development or foundry partners. The platform is designed for extendibility over multiple technology nodes. VSEA, #1 in VLSI customer satisfaction survey, is the industry benchmark for customer service and support.