VIISta HCP

The Production-Proven Choice of Advanced Device Manufacturers
VIISta HCP delivers the highest productivity on a production-proven, single-wafer architecture. It is the only high current system with an architecture that ensures both high yield and high productivity.

First in Single-Wafer High Current
Varian Semiconductor was the first to introduce single-wafer high current systems. The VIISta high current series is the high current market share leader and is in production at leading-edge memory, logic, and foundry manufacturers worldwide. VIISta HCP extends this leadership.

Highest Productivity
The VIISta HCP brings new innovations to further increase its productivity. Innovations on the patented dual-magnet ribbon beam architecture result in improved beamline transmission, higher on-wafer beam utilization, and higher beam current output.

Lowest Particle Level
Implant source chambers and beamline elements create particles due to depositions and beam strike. VIISta HCP’s patented dual-magnet ribbon beam architecture isolates the wafer from sources of particles. The second magnet filters out particles generated from beamline elements.

Precise Beam Steering
The VIISta HCP is the only high-current system that measures and adjusts beam steering. The unique, closed-loop Varian Positioning System (VPS) delivers accurate, repeatable and interlocked incident angle control for true zero degree and precise tilted angle implants.