Storm

Batch centrifugal spray cleaning tool for carriers and boxes, including 300mm Front Opening Unified Pods (FOUPs), Front Opening Shipping Box (FOSBs).

  • The Storm II, a high capacity cleaning system, and the Storm III, an economy cleaner, are both designed to clean cassette box or carrier sizes, up to 200mm
  • The Storm300 cleans and dries eight 300mm FOUP and eight FOUP doors in less than 30 minutes
  • The Storm300 cleans and dries up to 30 cassettes or FOUPs/FOSBs in an hour

Benefits

  • Low cost of ownership: the world's most economical cassette/box washer
  • The Storm is capable of through-the-wall installation
  • High productivity

Features

  • Rotates product through a DI water spray with optional surfactant to all sides of the product
  • Rotation can be reversed to ensure full spray penetration of product
  • Centrifugal acceleration drying, coupled with ULPA filtered and heated air
  • Surfactant delivery system enhances cleaning efficiency
  • Dual color touch screens with graphics display user interface
  • Electropolished stainless steel chamber and rotor
  • Ladder nests accept 13 and 25 wafer FOUPs (Storm300)
  • Twelve DI spray manifolds with multiple PVDF nozzles
  • Capable of through-the-wall installation
  • Vibration monitor
  • Anti-static system for drying cycle
  • Brushless DC motor drive with digital control of rotor positioning and RPM

This product is now supported by OEM Group (press release). 
Please contact Tamara McKinney Berry for more information.

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