Spray Solvent Tool

What Does It Do

• Mechanical and centrifugal forces on wafers rotating in a closed chamber assist and enhance the reaction of chemicals on the wafer surface
• Multi-nozzle flow rate capability ensures uniform coverage to both sides of the wafer surface, a factor that is critical in smaller geometries
• Closed loop process control for statistical consistency
• Chemicals are continuously recycled and filtered
• Offers excellent temperature control through precision, rapid chemical heating
• Controller provides flexibility of chemical delivery methods to match process requirements

How Does It Work

• Wafers rotate within a cassette, increasing effectiveness and assuring even coverage across the entire surface
• On-axis orientation keeps wafers parallel in a closed chamber with multiple spray manifolds to simultaneously bathe both sides of the product
• Programming versatility allows control of process chemical routing to match specific requirements

What It Can Do For You

• High throughput for low cost of ownership
• Flexibility - featuring two, four, or seven tank configuration in small footprint cabinet; process chambers, product carriers, and quick-disconnect rotors are available for wafers up to 200mm
• Zero clean room floor space for flush mount systems - the smallest footprint-to-throughput ratio of any solvent processor available
• Designed around operator safety with protection redundancy and numerous software and hardware interlocks
• Low DI water usage
• Minimal exhaust requirements
• Chemical reclaiming capability to minimize chemical usage
• Reliable, low maintenance design
• Reduced metallic ion contamination via Semitool's patented SEP21 electropolished stainless steel manufacturing process
• Controlled environment provides consistent, repeatable performance
• Simple, intuitive Pentium-based, touch screen control system requires minimal training

This product is now supported by OEM Group (press release). 
Please contact Tamara McKinney Berry for more information.