Spray Acid Tool

What Does It Do

  • In a closed-loop dry-to-dry, single or multiple chamber(s) using the following applications: GaAs Clean, GaAs Etch (Gate Recess Etch), Lead Free Bumping, Metals Etch, Oxide Etch, Photoresist Stripping FEOL, Post CMP Clean, Post Etch Residue (Polymer Removal), Pre Epi Deposition including SiGe, Thin Film Heads (GMR), Under Bump Metallurgy (UBM Etch), and Wafer Reclaim (Cu rework)

How Does It Work

  • Wafers are manually loaded via a carrier into a process chamber capable of handling up to 200mm substrates
  • Chemistry is either bulk fed or metered from concentrated fill vessels into a process tank. Chemistry is pumped from the tank through a filter to a distribution manifold, where it is either fed to the process chamber or recirculated back to the tank
  • Chemistry sent to the process chamber is delivered through multiple spray manifolds to the wafers' surfaces. Chemistry is then sent to a drain block, where it is either sent to the drain or is reclaimed back to the process tank

What It Can Do For You

  • High throughput for low cost of ownership
  • Flexibility - features up to four process tanks in single, double, or triple 25-wafer chamber configurations process chambers, product carriers and quick-disconnect rotors are available for wafers up to 200mm
  • Zero clean room floor space for flush mount systems - the smallest footprint-to-throughput ratio of any acidprocessor available
  • Designed for operator safety with numerous software and hardware interlocks
  • Low DI water usage
  • Minimal exhaust requirements
  • Chemical reclaiming capability to minimize chemical usage
  • Reliable, low maintenance design
  • Reduced metallic ion contamination via Semitool's patented SEP21 electropolished stainless steel manufacturing process
  • Controlled environment provides consistent repeatable performance
  • Simple, intuitive Intel-based, touch screen control system requires minimal training

This product is now supported by OEM Group (press release). 
Please contact Tamara McKinney Berry for more information.

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