Scepter Solvent

What Does It Do

• Doubles the processing capacity of previous generations and enhances process uniformity.
• Offers excellent temperature control through precision, rapid in-line chemical heating.
• Chemicals are continuously filtered and recycled.
• Sophisticated, multi-point flow monitoring and increased flow rate capability provides enhanced coverage to the wafer's surface, ensuring uniform coverage critical in smaller geometries.

How Does It Work

• Chamber accepts two 25-wafer cassettes, doubling throughput
• Small geometries can be processed in batch mode
• Two multiple nozzle manifolds are offset to maximize uniform, coverage demanded by small geometries
• In-line coil heaters, located near the manifold, rapidly heat chemistry for precision temperature control
• Semitool's SEP21 electropolished stainless steel tanks, chambers and rotors, minimize metallic ion contamination
• Larger more robust pumps render an increased flow ensuring uniform, repeatable coverage
• All chemistry-carrying lines are PFA and joints are fusion bonded, resulting in leak-less plumbing where it comes into contact with chemistry
• Designed with Intel-based, touch screen controller

What It Can Do For You

• High throughput for low cost of ownership.
• Flexibile tool hardware and controller provide flexible chemical delivery to match process requirement.
• Zero clean room floor space for flush mount systems
• Low DI water usage
• Low exhaust requirements
• Chemical reclaim capability to minimize chemical usage.
• Fusion-bonded chemical lines providing plumbing.
• Reliable, low maintenance design.
• Designed for operator safety and numerous software and hardware interlocks.
• Reduced metallic ion contamination via Semitool's patented SEP21 electropolished stainless steel tanks, chambers and rotors.
• Controlled environment provides consistent repeatable performance.

This product is now supported by OEM Group (press release).
Please contact Tamara McKinney Berry for more information.