Scepter Acid Tool

The semi-automated Scepter Acid Tool is a cost-effective solution for a wide array of surface preparation processes. The Scepter is based on Semitool's successful Spray Acid Tool (SAT) with over 600 chambers installed worldwide. The Scepter offers higher throughput and a reduced chemical consumption than previous platforms, but still provides small floorspace requirements and a low CoO. The Scepter Acid Tool features an all Teflon 50-wafer process chamber for two 25-wafer cassettes loaded sequentially. The rotor is built to accept up to 200mm product.

Features

• Less media consumption compared to competing wet bench platforms; chemicals can be filtered and reclaimed
• Up to four process tanks in single or double chamber configurations allow for an array of applications
• On-axis spray processing provides versatile capability to handle variations and today's process challenges
• Software and PC control is adaptable and offers multiple recipes
• Automated control of critical process parameters always provides consistent, repeatable results
• Enhanced spray technology provides uniform spray coverage
• Chemistry can be bulk fed or metered from concentrated fill vessels into the process tanks

This product is now supported by OEM Group (press release). 
Please contact Tamara McKinney Berry for more information.