Raider SP

The RAIDER is the fourth generation single wafer processing tool produced by Semitool.  It is the industry standard for high volume surface preparation systems, incorporating spray, vapor, immersion, megasonics and anneal technologies with automated single or dual-side wafer processing.

What Does It Do

• Utilizes Semitool's Capsule technology, chemical delivery can be either on the front side (with back-side protection), on the back side (with front-side protection), or both sides.
• Semitool's Capsule technology also allows surface tension gradient dry for advanced particle control
• Each capsule can process up to six chemical solutions
• Other chamber designs can accommodate immersion, spray, vapor, megasonics or anneal processing 
  

How Does It Work

• Single robot linear chamber allows high productivity and small footprint
• On-board chemical handling for mixing supply and control of process chemicals
• Class 1 mini environment
• Self-cleaning process chambers
• Closed-loop control provides full-time process monitoring and data logging, automatic fault detection, predictive/preventive maintenance, scrap prevention, interface to fab host/network