Raider Mini Quattro ECD

The Raider M-Quattro is a high-performance single-wafer ECD system featuring precision, fully automated wafer handling and multiple process chambers. Emerging processes and recipes developed on the Raider M-Quattro platform are directly transferable to the high volume manufacturing Raider GT ECD system, making the move from R&D to full production seamless and immediate.

Features

• Up to four process chambers same or mixed types for optimizing performance
• Small footprint <4.5m2
• Up to 300mm substrates
• Available for open cassette, SMIF, or FOUP
• On-board chemistry handling
• Up to four different chemistries
• On-board plating power supplies for plating
• Available end-point detection