Semiconductor

Centura Epi

Key Features

  • Crystal defect-free epi films for substrate applications
  • Uniform deposition of epi films with excellent wafer-to-wafer repeatability performance
  • Robust hardware technology with proven process for higher tool availability and lower CoO
  • Modular serviceable ergonomic design offering ease of maintenance and use
  • 2 or 4 chamber configuration for maximum flexibility

Applied Centura Epi is the industry standard solution for low-cost, epitaxial wafer manufacturing. Applied Centura Epi provides 100% slip free films, excellent film thickness uniformity, resistivity uniformity and low defect levels.

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