Equipment Performance

E3 Advanced Data Mining (ADM)

Key Features

  • Real-time process-monitoring rules
  • Easy-to-use web-based interface
  • Graphical ranking of findings and drill-down capabilities
  • Seamless integration with other E3 modules

The E3 Advanced Data Mining (ADM) module automatically analyzes thousands of sensor statistics across runs or wafers to allow engineers to immediately discover process problems, reduce variation, and increase control and yield. Advanced data mining capability determines statistically significant correlations, identifies problems, diagnoses possible causes and prevents recurrences.

  • Speeds analysis time by 75 percent or more over manual approaches
  • Reduces number of process parameters requiring measurement by 95 percent
  • Guides users through questions and determines issues using analysis algorithms and statistics based on responses
  • Requires no specialized analysis algorithms or statistical knowledge
  • Provides analysis and data mining by comparing data from two similar functions
  • Performs analysis of user data and ranks findings graphically with drill-down capabilities
  • Delivers reports grouped by tool, chamber or wafer
  • Integrates seamlessly with E3 Run-to-Run (R2R), E3 Fault Detection and Classification (FDC), E3 Statistical Process Control (SPC) and E3 Equipment Performance Tracking (EPT)

Benefits

  • Speed problem-resolution of toughest manufacturing issues
  • Increase product quality
  • Decrease number of send-ahead wafers
  • Improve yield

To request product information from an automation software sales specialist, click here.