skip to main content

Reflexion®

Our Reflexion platform is the industry’s leading chemical mechanical planarization (CMP) platform, used for all segments (logic, foundry, DRAM , Flash , prime silicon, and wafer-level packaging) and the full complement of dielectric and metal applications. Systems using Reflexion platforms are equipped with industry-leading Titan polishing heads, in-situ process controls, and Marangoni vapor drying technologies. They also incorporate our unique approach to transporting wafers directly from one polishing platen to the next.