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Endura®

Our Endura platform is the most successful metallization system in the history of the semiconductor industry. Endura systems revolutionized semiconductor metallization by delivering breakthrough technologies and levels of reliability, serviceability and flexibility that far surpassed existing capabilities. The vast majority of microchips made in the last 20 years have been created using one of the more than 4,500 Endura systems that have shipped across the globe to over 100 customers.

The Endura system has a long list of firsts: it was the first ultra-high vacuum production system in the industry, enabling enormously improved film purity which reduced electromigration by an order of magnitude, and allowed our customers to fabricate the first reliable aluminum interconnects. It had the first magnetically-coupled vacuum robots, legendary reliability and the first staged vacuum architecture with up to nine process chambers, giving the system a unique ability to mix and match process chambers to create integrated multi-step process sequences that is still unparalleled today.