skip to main content

Centura®

Our most versatile platform, over 8,000 Centura systems have been shipped to customers around the world for an unmatched range of applications including ALD, CVD, epitaxy, etch, photomask fabrication, PVD, plasma doping, plasma nitridation and RTP, as well as integrated multi-step processes such as high-k transistor gate stack fabrication.

The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.