Applied System Enhancements improve performance and productivity, and provide additional capabilities to the installed base that were not available when the original system was purchased. Product Improvement Kits (PIK) can significantly improve productivity, operating cost, particle performance and energy efficiency.
Features:
- Wafer size conversions
- System reconfigurations
- Process chamber conversions
- Robotics improvements
- Tool software
Benefits:
- Extends system lifetime, maximizes return on investment
- Can improve uptime, mean time to clean and mean time to repair
- Can reduce CoO
- Updated chambers and tools meet changing device, market demands
- May improve throughput 5-20% depending on process and system
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