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		Solar Technical Articles/Papers Crystalline Successful Market Entry of Applied Materials' ATON™ System for Sputtered SiN:H, Twentyfirst European Photovoltaic Solar Energy Conference, September 2006 (225KB) Surface Passivation for Solar Cells by Large Scale Inline Sputtering of Silicon Nitride, Twentieth European Photovoltaic Solar Energy Conference, June 2005 (498KB) Large Area Production Technology for Solar Cells - Sputter Deposition of SiN:H, Twentieth European Photovoltaic Solar Energy Conference, June 2005 (824KB)