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Raider® Mini Quattro ECD

The Raider M-Quattro is a high-performance single-wafer ECD system featuring fully automated precision wafer handling and multiple process chambers. Emerging processes and recipes developed on the Raider M-Quattro platform are directly transferable to the high volume manufacturing Raider GT ECD system, making the move from R&D to full production seamless and immediate.

Features

  • Up to four process chambers of the same or different types for optimizing performance
  • Small footprint <4.5m2
  • Up to 300mm substrates
  • Available for open cassette, SMIF, or FOUP
  • On-board chemistry handling
  • Up to four different chemistries
  • On-board plating power supplies for plating
  • Available end-point detection