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		Mask Products Technical Articles/Papers Mask Inspection Aerial image-based off-focus inspection: lithography process window analysis during mask inspection, Society of Photo-Optical Instrumentation Engineers, Bacus/Photomask 2003 (651KB) Mask Metrology Corner roundness and contact area algorithms for reticle metrology through the use of region connectivity extraction, Society of Photo-Optical Instrumentation Engineers, Bacus/Photomask 2003 (768KB) Mask Patterning No articles at this time. Tetra Mask Etch Optimization of a 65nm Alternating Phase Shift Quartz Etch Process, Society of Photo-Optical Instrumentation Engineers, Bacus/Photomask 2003 (293KB) Examination of Various Endpoint Methods for Chrome Mask Etch, Society of Photo-Optical Instrumentation Engineers, Bacus/Photomask 2003 (162KB) View Archive