The Applied iSystem controller is the industry’s only subfab solution that optimizes subfab resource consumption without any risk to process or throughput. Many customers have achieved rapid ROI after iSystem controller installation.
While monitoring tool operation, the Applied iSystem controller collects valuable data that can be used to generate resource consumption reports and greenhouse emissions reports among other environmental factors. Each small footprint iSystem controller is capable of supporting up to four tools and is easily installed on both Applied and non-Applied Materials 200mm and 300mm process tools. With more than 1,000 units currently installed, manufacturers have reported a rapid return on investment.
Easy installation in new and existing fabs
Configurable at tool or subfab level
Fail-safe safety protocol
True fab and subfab synchronization
Intelligent idle mode
Reduces energy-related costs by ~20%
Connects to process tools in real-time
Enables green features with no equipment changes
Provides continuous greenhouse emissions reporting
Recovers from idle to process state fuel flow in <2 seconds