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Applied iSYS is the industry’s first fully integrated subfab solution for controlling emissions in the semiconductor fab. Available for 300mm and 200mm CVD and etch applications, the iSYS platform is highly compact and energy-efficient, with innovative design features including a unique control system that is synchronized with the wafer processing tool. iSYS makes automatic real-time adjustments in resource consumption depending on changing tool conditions.
| ENERGY SAVINGS |
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Intelligent idle mode |
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Reduced power consumption |
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20% Reduction in energy costs |
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| SMALLER FOOTPRINT |
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40% Less space |
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Integrated design |
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Systematic approach |
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| IMPROVED OPERATION |
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Energy smart metering |
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Real-time connection to process tools |
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Continuous greenhouse emissions reporting |
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| INNOVATIVE DESIGN |
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Reduced number of external connections |
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24-hour installation |
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Easier, more ergonomic maintenance |
Download the iSYS product brochure (550KB, PDF)
Read the article, "Bringing Efficiency to the Subfab" (337KB, PDF)
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