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Patterned wafer defect detection systems inspect wafers as they move between processing steps. Defects may include particles, open lines, shorts between lines, or other problems. "Patterned" product wafers (meaning they have the circuit patterns imprinted on them) require the finding of defects in the deep sub-micron range.
Patterned wafer inspection technology typically uses white light or lasers to illuminate the wafer surface. Reflected light images from surface features are collected and then fed into a powerful image processing system which can identify possible defects.
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