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iSystem™ Controller

While monitoring tool operation, the Applied iSystem controller collects valuable data that can be used to generate resource consumption reports and greenhouse gas emissions reports among other environmental factors. Each small footprint iSystem controller is capable of supporting up to four tools and is easily installed on both Applied and non-Applied Materials 200mm and 300mm process tools. With more than 3000 tool connections currently installed, manufacturers have reported rapid ROI after using the iSystem controller.

특징

  • 신규 및 기존 제조 설비에 쉽게 설치

  • 장비 또는 서브팹 수준에서 구성 가능

  • 안전장치를 구비한 안전 프로토콜

  • 팹과 서브 팹의 충실한 동기화

  • 지능형 유휴 모드

  • Supports Semi E167 and E175 standards for Sleep Mode

  • Subfab data collection, alarm monitoring, notifications and reporting

  • Subfab status visibility from a single monitor

  • Applied E3 and FSS data server support for complete fab/subfab data analysis

혜택

  • 에너지 관련 비용을 약 20% 경감

  • 공정 장비에 실시간으로 연결

  • Enables green features with no equipment changes or process re-qualification needed

  • Provides continuous greenhouse gas emissions reporting

  • Enables fab/subfab data integration and overlay

  • 유휴 상태에서 공정 상태까지 연료 유량을 <2초 내에 복원