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Low Temperature Polysilicon

Low temperature polysilicon (LTPS) transistor manufacturing is more complex than amorphous silicon (a-Si) and metal oxide transistor fabrication, requiring additional steps and processes.

While this increases cost, LTPS can deliver ten-times the mobility of today’s metal oxide-based screens and much higher resolution and pixel density, making it an optimal solution for OLED-based mobile devices, ultra-definition TV and retina display smart phones and tablets. The introduction of larger-scale LTPS PECVD equipment will allow leading panel makers to scale LTPS technology to larger substrates to drive down the cost of these displays.