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Applied Performance Service

Applied Performance Service (APS) is the most comprehensive service solution available for Applied Materials equipment. The APS product provides up to 7x24 service coverage and includes tool-specific performance commitments such as tool uptime or availability with predictable cost. Optimized tool productivity, committed supplier-dependent uptime and availability of consumable and non-consumable parts, with onsite rapid downs support reduces your system Cost of Ownership (CoO).

APS includes preventive and corrective maintenance, genuine consumable and non-consumable parts, Applied managed inventory, with kitting and cleaning of parts.


  • Tool-specific metrics increase overall fab productivity
  • Increase production stability through controlled uptime targets
  • Optimize maintenance schedules with predictive technologies
  • Maintain tool stability with OEM trained software expertise


  • Engineer support with Applied Proprietary Service Technologies
  • Corrective and preventative maintenance support using certified labor
  • Pre-defined on-site coverage with guaranteed response time
  • Single supply chain for volume discounted consumable and non-consumable parts
  • Priority for non-consumables parts coverage on failure
  • System software upgrades