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Semiconductor Subfab Solutions

HELPING FABS REDUCE COSTS AND ENABLE GREEN COMPLIANCE

AGS also offers multiple subfab options designed to help fabs lower costs, reduce environmental impact and meet EPA reporting regulations for greenhouse gas emissions.

iSYS™ CONTROLLER

A unique control system that synchronizes the operating state of chamber pumps and all associated abatement units with the wafer processing system.

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ZFP2

The industry’s leading zero footprint, point-of-use abatement technology for oxide and polysilicon etch applications.

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